Fundamental Principles of Optical Lithography
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components, millions of...Paperback$13899Unit price /UnavailableAvailableShips in 3-4 weeks